RUS
25.11.2017  
  


Nanolithography Sector (NS)

Head: Sergey I.Dorozhkin

Tel.: 2-82-61, e-mail: dorozh@issp.ac.ru

Main research directions:

  1. Structurization of multilayer thin-film metal-, semiconductor- and dielectric-based heterostructures.
  2. Improvement of existing and development of novel techniques of optical and electron nanolithography.
  3. Fabrication of experimental thin film nanostructures.

 

 

Contact information

Tel.: 8(496)52 219-82
+7 906 095 4402

Fax: +7(496) 522 8160
8(496) 522 8160

Address: Institute of Solid State Physics RAS, Chernogolovka, Moscow District, 2 Academician Ossipyan str., 142432 Russia

E-mail:

WWW: www.issp.ac.ru


  
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