Head: Sergey I.Dorozhkin

Tel.: 2-82-61, e-mail: This email address is being protected from spambots. You need JavaScript enabled to view it.

Main research directions:

  1. Structurization of multilayer thin-film metal-, semiconductor- and dielectric-based heterostructures.
  2. Improvement of existing and development of novel techniques of optical and electron nanolithography.
  3. Fabrication of experimental thin film nanostructures.